Growth of Ultrathin Al<sub>2</sub>O<sub>3</sub> Films on n-InP Substrates as Insulating Layers by RF Magnetron Sputtering and Study on the Optical and Dielectric Properties
Here, we report an explorative study of an attempt to fabricate ultrathin aluminum oxide films on n-InP substrates by radio-frequency (RF) magnetron sputtering as a candidate for insulating layers in semiconductor lasers for optical communication. Film thickness and morphology were monitored to stud...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/5/341 |