Plasma processing of large curved surfaces for superconducting rf cavity modification
Plasma-based surface modification of niobium is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. We have demonstrated surface layer removal in an asymmetric nonplanar geometry, using a simple cylindrical cavity. The etching rate is highly correlated with the...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2014-12-01
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| Series: | Physical Review Special Topics. Accelerators and Beams |
| Online Access: | http://doi.org/10.1103/PhysRevSTAB.17.122001 |