Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution (root mean square of measured values), based on partial scanning of interference signal. The paper describes the construction of the measurem...

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Bibliographic Details
Main Authors: Sysoev Evgeny, Kosolobov Sergey, Kulikov Rodion, Latyshev Alexander, Sitnikov Sergey, Vykhristyuk Ignat
Format: Article
Language:English
Published: Sciendo 2017-10-01
Series:Measurement Science Review
Subjects:
nanorelief
monatomic steps
low-coherence
white light interferometer
subnanometer resolution
Online Access:https://doi.org/10.1515/msr-2017-0025

Internet

https://doi.org/10.1515/msr-2017-0025

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