Fabrication of Nb/A1 Superconducting Tunnel Junction
We report the successful fabrication and I--V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and 80 μm were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafe...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Korean Space Science Society (KSSS)
2004-12-01
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| Series: | Journal of Astronomy and Space Sciences |
| Subjects: | |
| Online Access: | http://ocean.kisti.re.kr/downfile/volume/kosss/OJOOBS/2004/v21n4/OJOOBS_2004_v21n4_481.pdf |