MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through=holes of the silicon wafer...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/3/809 |