Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model
Metal-organic chemical vapour deposition (MOCVD) is a key technique for fabricating GaN thin film structures for light-emitting and semiconductor laser diodes. Film uniformity is an important index to measure equipment performance and chip processes. This paper introduces a method to improve the qua...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
The Royal Society
2018-01-01
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Series: | Royal Society Open Science |
Subjects: | |
Online Access: | https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.171757 |