Self-Organization-Based Fabrication of Stable Noble-Metal Nanostructures on Large-Area Dielectric Substrates

A cost-effective fabrication of random noble-metal nanostructures with a feature size of the order of 10 nm on a large-area dielectric substrate is described. The method combines dry etching of the substrate through a self-organized metal mask with a directional deposition of a multilayered metal fi...

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Bibliographic Details
Main Authors: Victor Ovchinnikov, Andriy Shevchenko
Format: Article
Language:English
Published: Hindawi Limited 2013-01-01
Series:Journal of Chemistry
Online Access:http://dx.doi.org/10.1155/2013/158431