Self-Organization-Based Fabrication of Stable Noble-Metal Nanostructures on Large-Area Dielectric Substrates
A cost-effective fabrication of random noble-metal nanostructures with a feature size of the order of 10 nm on a large-area dielectric substrate is described. The method combines dry etching of the substrate through a self-organized metal mask with a directional deposition of a multilayered metal fi...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2013-01-01
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| Series: | Journal of Chemistry |
| Online Access: | http://dx.doi.org/10.1155/2013/158431 |