Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering

Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering

We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the mul...

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Bibliographic Details
Main Authors: Jian-Fu Tang, Chun-Hong Huang, Ching-Yen Lin, Fu-Chi Yang, Chi-Lung Chang
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Coatings
Subjects:
high-power impulse magnetron sputtering
rotation speed
multilayer
adhesion
Online Access:https://www.mdpi.com/2079-6412/10/8/742

Internet

https://www.mdpi.com/2079-6412/10/8/742

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