Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering
We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the mul...
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doaj-ed9cf8bbc6554cc4a9222ea76560549e2020-11-25T03:43:02ZengMDPI AGCoatings2079-64122020-07-011074274210.3390/coatings10080742Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron SputteringJian-Fu Tang0Chun-Hong Huang1Ching-Yen Lin2Fu-Chi Yang3Chi-Lung Chang4Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, TaiwanDepartment of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, TaiwanDepartment of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, TaiwanCenter for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, TaiwanCenter for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, TaiwanWe investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength.https://www.mdpi.com/2079-6412/10/8/742high-power impulse magnetron sputteringrotation speedmultilayeradhesion |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Jian-Fu Tang Chun-Hong Huang Ching-Yen Lin Fu-Chi Yang Chi-Lung Chang |
spellingShingle |
Jian-Fu Tang Chun-Hong Huang Ching-Yen Lin Fu-Chi Yang Chi-Lung Chang Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering Coatings high-power impulse magnetron sputtering rotation speed multilayer adhesion |
author_facet |
Jian-Fu Tang Chun-Hong Huang Ching-Yen Lin Fu-Chi Yang Chi-Lung Chang |
author_sort |
Jian-Fu Tang |
title |
Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering |
title_short |
Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering |
title_full |
Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering |
title_fullStr |
Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering |
title_full_unstemmed |
Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering |
title_sort |
effects of substrate rotation speed on structure and adhesion properties of crn/cralsin multilayer coatings prepared using high-power impulse magnetron sputtering |
publisher |
MDPI AG |
series |
Coatings |
issn |
2079-6412 |
publishDate |
2020-07-01 |
description |
We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength. |
topic |
high-power impulse magnetron sputtering rotation speed multilayer adhesion |
url |
https://www.mdpi.com/2079-6412/10/8/742 |
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