ALD-passivated silicon nanowires for broadband absorption applications
Silicon photonics enables the fabrication of optical devices with standard semiconductor processing technology. With high transparency and modal confinement, Si has matured into a well-established infrared optical material. Nanostructured silicon has been studied extensively due to its optical prope...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0054104 |