Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A pr...

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Bibliographic Details
Main Authors: Malar Chellasivalingam, Hassan Imran, Milind Pandit, Adam M. Boies, Ashwin A. Seshia
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Sensors
Subjects:
particulate matter
soot particles
coupled MEMS resonators
amplitude ratio stability
frequency stability
amplitude ratio sensitivity
Online Access:https://www.mdpi.com/1424-8220/20/11/3162

Internet

https://www.mdpi.com/1424-8220/20/11/3162

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