Effective Sensor Properties of a Novel Co-Resonant Cantilever Sensor

Co-resonantly coupled cantilever sensors have recently been introduced as a very promising concept to strongly increase the sensitivity of dynamic-mode cantilever MEMS sensors (several orders of magnitude experimentally demonstrated) while maintaining the ease of detection. Mechanical coupling and e...

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Bibliographic Details
Main Author: Julia Körner
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Proceedings
Subjects:
Online Access:http://www.mdpi.com/2504-3900/2/13/974