Effective Sensor Properties of a Novel Co-Resonant Cantilever Sensor
Co-resonantly coupled cantilever sensors have recently been introduced as a very promising concept to strongly increase the sensitivity of dynamic-mode cantilever MEMS sensors (several orders of magnitude experimentally demonstrated) while maintaining the ease of detection. Mechanical coupling and e...
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Format: | Article |
Language: | English |
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MDPI AG
2019-01-01
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Series: | Proceedings |
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Online Access: | http://www.mdpi.com/2504-3900/2/13/974 |