Fabrications of <i>L</i>-Band LiNbO<sub>3</sub>-Based SAW Resonators for Aerospace Applications

Fabrications of <i>L</i>-Band LiNbO<sub>3</sub>-Based SAW Resonators for Aerospace Applications

High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an <i>L</i>-band SAW resonator based on 128&#176; Y-X LiNbO&l...

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Bibliographic Details
Main Authors: Baofa Hu, Shaoda Zhang, Hong Zhang, Wenlong Lv, Chunquan Zhang, Xueqin Lv, Haisheng San
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Micromachines
Subjects:
surface acoustic wave (SAW)
resonator
electron beam lithography
SAW sensing
Online Access:https://www.mdpi.com/2072-666X/10/6/349

Internet

https://www.mdpi.com/2072-666X/10/6/349

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