Ultra-High Sensitive (Ppt) Gas Sensor Based on the Pulse Heating Using MEMS Technique
High sensitivity and low limit of detection to volatile organic compounds (VOCs) gases are typical properties on the resistive-type semiconductor gas sensors using SnO<sub>2</sub>-based materials. […]
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-06-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/14/1/24 |