Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning

Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning

An approach for fabricating sub-wavelength antireflective structures on SiC material is demonstrated. A time-efficient scalable nanopatterning method by rapid thermal annealing of thin metal film is applied followed by a dry etching process. Size-dependent optical properties of the antireflective Si...

Full description

Bibliographic Details
Main Authors: Yiyu Ou, Ahmed Fadil, Haiyan Ou
Format: Article
Language:English
Published: MDPI AG 2016-09-01
Series:Micromachines
Subjects:
rapid thermal process
self-assembled nanopattern
antireflective surface
sub-wavelength structure
silicon carbide
Online Access:http://www.mdpi.com/2072-666X/7/9/152

Internet

http://www.mdpi.com/2072-666X/7/9/152

Similar Items