The FDTD analysis for dark field in-process depth measurements of fine microgrooves
Microstructures are widely used in the manufacture of functional surfaces. An optical-based in-process and non-invasive method is preferred for the depth measurement of the fine microgroove structure. A dark-field method is proposed using the features of polarization based on the waveguide theory. A...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421002208 |