The FDTD analysis for dark field in-process depth measurements of fine microgrooves

The FDTD analysis for dark field in-process depth measurements of fine microgrooves

Microstructures are widely used in the manufacture of functional surfaces. An optical-based in-process and non-invasive method is preferred for the depth measurement of the fine microgroove structure. A dark-field method is proposed using the features of polarization based on the waveguide theory. A...

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Main Authors: Yizhao Guan, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
Format: Article
Language:English
Published: Elsevier 2021-12-01
Series:Measurement: Sensors
Subjects:
Depth measurement
FDTD
Dark-field
Microgroove
Online Access:http://www.sciencedirect.com/science/article/pii/S2665917421002208
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spelling doaj-efbf5a10d31f4cd4850530e18f43ae842021-09-23T04:41:10ZengElsevierMeasurement: Sensors2665-91742021-12-0118100257The FDTD analysis for dark field in-process depth measurements of fine microgroovesYizhao Guan0Shotaro Kadoya1Masaki Michihata2Satoru Takahashi3Precision Engineering, Department of Engineering, The University of Tokyo, Tokyo, JapanResearch Center for Advanced Science and Technology (RCAST), The University of Tokyo, Tokyo, JapanPrecision Engineering, Department of Engineering, The University of Tokyo, Tokyo, JapanCorresponding author.; Research Center for Advanced Science and Technology (RCAST), The University of Tokyo, Tokyo, JapanMicrostructures are widely used in the manufacture of functional surfaces. An optical-based in-process and non-invasive method is preferred for the depth measurement of the fine microgroove structure. A dark-field method is proposed using the features of polarization based on the waveguide theory. According to the numerical simulation based on the FDTD method and Fourier optics, the proposed method allows depth measurement for fine microgroove having an aperture size of less than several hundred nanometers with an aspect ratio (width/depth) of larger than one, even under the far-field measurement.http://www.sciencedirect.com/science/article/pii/S2665917421002208Depth measurementFDTDDark-fieldMicrogroove
collection DOAJ
language English
format Article
sources DOAJ
author Yizhao Guan
Shotaro Kadoya
Masaki Michihata
Satoru Takahashi
spellingShingle Yizhao Guan
Shotaro Kadoya
Masaki Michihata
Satoru Takahashi
The FDTD analysis for dark field in-process depth measurements of fine microgrooves
Measurement: Sensors
Depth measurement
FDTD
Dark-field
Microgroove
author_facet Yizhao Guan
Shotaro Kadoya
Masaki Michihata
Satoru Takahashi
author_sort Yizhao Guan
title The FDTD analysis for dark field in-process depth measurements of fine microgrooves
title_short The FDTD analysis for dark field in-process depth measurements of fine microgrooves
title_full The FDTD analysis for dark field in-process depth measurements of fine microgrooves
title_fullStr The FDTD analysis for dark field in-process depth measurements of fine microgrooves
title_full_unstemmed The FDTD analysis for dark field in-process depth measurements of fine microgrooves
title_sort fdtd analysis for dark field in-process depth measurements of fine microgrooves
publisher Elsevier
series Measurement: Sensors
issn 2665-9174
publishDate 2021-12-01
description Microstructures are widely used in the manufacture of functional surfaces. An optical-based in-process and non-invasive method is preferred for the depth measurement of the fine microgroove structure. A dark-field method is proposed using the features of polarization based on the waveguide theory. According to the numerical simulation based on the FDTD method and Fourier optics, the proposed method allows depth measurement for fine microgroove having an aperture size of less than several hundred nanometers with an aspect ratio (width/depth) of larger than one, even under the far-field measurement.
topic Depth measurement
FDTD
Dark-field
Microgroove
url http://www.sciencedirect.com/science/article/pii/S2665917421002208
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