Effects of vacuum rapid thermal annealing on the electrical characteristics of amorphous indium gallium zinc oxide thin films

We investigated the effects of vacuum rapid thermal annealing (RTA) on the electrical characteristics of amorphous indium gallium zinc oxide (a-IGZO) thin films. The a-IGZO films deposited by radiofrequency sputtering were subjected to vacuum annealing under various temperature and pressure conditio...

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Bibliographic Details
Main Authors: Hyun-Woo Lee, Won-Ju Cho
Format: Article
Language:English
Published: AIP Publishing LLC 2018-01-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5009895