A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements
An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sen...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2012-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/12/4/4051/ |