Bonding States of Hydrogen in Plasma-Deposited Hydrocarbon Films
We applied temperature-programmed desorption (TPD) spectroscopy to study the bonding of hydrogen in amorphous hydrogenated carbon (a−C:H) films. Typical hard plasma-deposited a−C:H films with an initial hydrogen content (H/(H+C)) of about 30% were used as samples. About 85% of th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
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| Series: | C |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2311-5629/6/1/3 |