Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments
Conventional approaches to microscale actuation, such as electrostatic, have difficulty in achieving large motion at moderate voltages. Recently, actuators relying on the active control of capillary pressure have been demonstrated, with the pressure change caused by electrowetting on a pair of oppos...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/9/11/545 |