Effects of mode couplings on the vibration characteristics of partially electroded thin-film bulk acoustic wave resonators
Mode coupling vibrations in thin-film bulk acoustic wave resonators (FBARs) were systematically analyzed in the series of our work. Previously, the two-dimensional theory of multi-layered FBAR plate has been established and used for the analysis of both free and forced vibrations of a fully electrod...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5092541 |