Investigation of Acoustic Injection on the MPU6050 Accelerometer

Investigation of Acoustic Injection on the MPU6050 Accelerometer

Acoustic injection is one of the most dangerous ways of causing micro-electro−mechanical systems (MEMS) failures. In this paper, the failure mechanism of acoustic injection on the microprocessor unit 6050 (MPU6050) accelerometer is investigated by both experiment and simulation. A testing...

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Bibliographic Details
Main Authors: Yunfan Zhang, Hui Li, Shengnan Shen, Guohao Zhang, Yun Yang, Zefeng Liu, Qisen Xie, Chaofu Gao, Pengfei Zhang, Wu Zhao
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Sensors
Subjects:
MEMS accelerometer
capacitor
acoustic injection
resonant frequency
deformation
Online Access:https://www.mdpi.com/1424-8220/19/14/3083

Internet

https://www.mdpi.com/1424-8220/19/14/3083

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