Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation
<p>Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2018-11-01
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| Series: | Mechanical Sciences |
| Online Access: | https://www.mech-sci.net/9/417/2018/ms-9-417-2018.pdf |