On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge
The kinetics of the sputtered atoms from the metallic target as well as the time-space distribution of the argon metastable atoms have been investigated for DC and high power pulse magnetron discharge by means of Tunable Diode – Laser Absorption Spectroscopy (TD-LAS) and Tunable Diode – Laser Induce...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sciendo
2012-12-01
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| Series: | Annals of West University of Timisoara: Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/awutp-2015-0007 |