Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators

Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators

In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, laser ablation technique and the mechanical micromachi...

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Bibliographic Details
Main Authors: Giacomo Bettella, Gianluca Pozza, Sebastian Kroesen, Riccardo Zamboni, Enrico Baggio, Carlo Montevecchi, Annamaria Zaltron, Ludovic Gauthier-Manuel, Giampaolo Mistura, Claudio Furlan, Mathieu Chauvet, Cornelia Denz, Cinzia Sada
Format: Article
Language:English
Published: MDPI AG 2017-06-01
Series:Micromachines
Subjects:
microfluidics
droplets
lithium niobate
micromachining
laser ablation
femtosecond
dicing
Online Access:http://www.mdpi.com/2072-666X/8/6/185

Internet

http://www.mdpi.com/2072-666X/8/6/185

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