Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes

Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes

The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure the cutoff frequency in a transmission (S<sub>21</sub>) spectrum. For real-time electron density measurement in plasma processing, three different types have been demonstrated: point-type, ring-type...

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Bibliographic Details
Main Authors: Si Jun Kim, Jang Jae Lee, Young Seok Lee, Hee Jung Yeom, Hyo Chang Lee, Jung-Hyung Kim, Shin Jae You
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Applied Sciences
Subjects:
plasma diagnostics
electron density measurement
planar microwave cutoff probe
bar-type cutoff probe
ring-type cutoff probe
computational characterization
Online Access:https://www.mdpi.com/2076-3417/10/20/7066

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https://www.mdpi.com/2076-3417/10/20/7066

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