The Effect of Annealing Ambience on the Material and Photodetector Characteristics of Sputtered ZnGa<sub>2</sub>O<sub>4</sub> Films
Spinel ZnGa<sub>2</sub>O<sub>4</sub> films were grown on c-plane sapphire substrates at the substrate temperature of 400 °C by radio-frequency magnetron sputtering. Post thermal annealing was employed at the annealing temperature of 700 °C in order to enhance their crystal qu...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-09-01
|
Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/11/9/2316 |