Reducing virtual source size by using facetless electron source for high brightness
Brightness of an electron source is key for the high spatial resolution of electron microscopy and analysis. A small source size is essential for high brightness, and it has been achieved by using small crystal facets; however, the emission current is reduced when the facet area is decreased. To ach...
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Online Access: | http://dx.doi.org/10.1063/1.5098528 |
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doaj-f48e029c66fa4d89b0bcd7b201ad66ad2020-11-24T21:33:19ZengAIP Publishing LLCAIP Advances2158-32262019-06-0196065001065001-510.1063/1.5098528001906ADVReducing virtual source size by using facetless electron source for high brightnessSoichiro Matsunaga0Yasunari Sohda1Center for Technology Innovation – Electronics, Research and Development Group, Hitachi, Ltd., Kokubunji-shi, Tokyo 185-8601, JapanCenter for Technology Innovation – Electronics, Research and Development Group, Hitachi, Ltd., Kokubunji-shi, Tokyo 185-8601, JapanBrightness of an electron source is key for the high spatial resolution of electron microscopy and analysis. A small source size is essential for high brightness, and it has been achieved by using small crystal facets; however, the emission current is reduced when the facet area is decreased. To achieve a small source size while maintaining a large emission current, we conceived of the novel idea of a facetless electron source with a curved emission surface. Computational simulations of electron trajectories revealed that the virtual source, which is the spot at which back-projected trajectories are focused, of a facetless source was smaller than that of the conventional source with a facet and that the brightness of the facetless source was approximately four times larger. To achieve electron emission from a curved surface, we fabricated a facetless source by coating amorphous carbon on a metallic electron source. Electron emission from the coated surface showed a homogeneous pattern, which is clear evidence for emission from the curved surface of the facetless source.http://dx.doi.org/10.1063/1.5098528 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Soichiro Matsunaga Yasunari Sohda |
spellingShingle |
Soichiro Matsunaga Yasunari Sohda Reducing virtual source size by using facetless electron source for high brightness AIP Advances |
author_facet |
Soichiro Matsunaga Yasunari Sohda |
author_sort |
Soichiro Matsunaga |
title |
Reducing virtual source size by using facetless electron source for high brightness |
title_short |
Reducing virtual source size by using facetless electron source for high brightness |
title_full |
Reducing virtual source size by using facetless electron source for high brightness |
title_fullStr |
Reducing virtual source size by using facetless electron source for high brightness |
title_full_unstemmed |
Reducing virtual source size by using facetless electron source for high brightness |
title_sort |
reducing virtual source size by using facetless electron source for high brightness |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2019-06-01 |
description |
Brightness of an electron source is key for the high spatial resolution of electron microscopy and analysis. A small source size is essential for high brightness, and it has been achieved by using small crystal facets; however, the emission current is reduced when the facet area is decreased. To achieve a small source size while maintaining a large emission current, we conceived of the novel idea of a facetless electron source with a curved emission surface. Computational simulations of electron trajectories revealed that the virtual source, which is the spot at which back-projected trajectories are focused, of a facetless source was smaller than that of the conventional source with a facet and that the brightness of the facetless source was approximately four times larger. To achieve electron emission from a curved surface, we fabricated a facetless source by coating amorphous carbon on a metallic electron source. Electron emission from the coated surface showed a homogeneous pattern, which is clear evidence for emission from the curved surface of the facetless source. |
url |
http://dx.doi.org/10.1063/1.5098528 |
work_keys_str_mv |
AT soichiromatsunaga reducingvirtualsourcesizebyusingfacetlesselectronsourceforhighbrightness AT yasunarisohda reducingvirtualsourcesizebyusingfacetlesselectronsourceforhighbrightness |
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1725953686974234624 |