Thin film zinc oxide gas sensor fabricated using near-field electrospray
Near-field electrospray was used to deposit zinc acetate precursor particles over comb electrodes. These particles were heated and oxidized to form a zinc oxide (ZnO) semiconductor at 500 °C. The resulting ZnO thin film on the comb electrode was incorporated into a gas sensor, which was examined usi...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4971273 |