An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery
This paper presents the fabrication process of a single-chamber planar valveless micropump driven by an external electromagnetic actuator. This micropump features a pair of micro diffuser and nozzle elements used to rectify the fluid flow, and an elastic magnetic membrane used to regulate the pressu...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2011-07-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/2/3/345/ |