An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery

This paper presents the fabrication process of a single-chamber planar valveless micropump driven by an external electromagnetic actuator. This micropump features a pair of micro diffuser and nozzle elements used to rectify the fluid flow, and an elastic magnetic membrane used to regulate the pressu...

Full description

Bibliographic Details
Main Authors: Farid Amirouche, Yu Zhou
Format: Article
Language:English
Published: MDPI AG 2011-07-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/2/3/345/