Low-order Damping and Tracking Control for Scanning Probe Systems
This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2015-11-01
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| Series: | Frontiers in Mechanical Engineering |
| Subjects: | |
| Online Access: | http://journal.frontiersin.org/Journal/10.3389/fmech.2015.00014/full |