Electron transport coefficients in binary mixtures of tetramethylsilane gas with Kr, Xe, He and Ne gases
Tetramethylsilane, alone and in combination with inert gases are widely used in various material processing. The electron transport coefficients in binary mixtures tetramethylsilane gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was firstly calculated and analyzed by a two-term a...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2018-01-01
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Series: | MATEC Web of Conferences |
Online Access: | https://doi.org/10.1051/matecconf/201818911006 |