Effect of Si and SiO2 Substrates on the Geometries of As-Grown Carbon Coils
Carbon coils could be synthesized using C2H2/H2 as source gases and SF6 as an incorporated additive gas under thermal chemical vapor deposition system. Si substrate, SiO2 thin film deposited Si substrate (SiO2 substrate), and quartz substrate were employed to elucidate the effect of substrate on the...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2012-01-01
|
Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2012/389248 |