Suppression of “volcano” morphology and parasitic defect luminescence in AlGaN-based deep-UV light-emitting diode epitaxy

Suppression of “volcano” morphology and parasitic defect luminescence in AlGaN-based deep-UV light-emitting diode epitaxy

In this study we overcame several critical growth issues related to epitaxy in AlGaN deep-ultraviolet light-emitting diodes. Irregular-shaped pits with dislocation clusters were observed in micron-thick layers of AlGaN on AlN. The strain-induced morphology and defects were suppressed after the inser...

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Bibliographic Details
Main Authors: Chia-Yen Huang, Tsung-Yen Liu, Shih-Ming Huang, Kai-Hsiang Chang, Tsu-Ying Tai, Chieh-Hsiung Kuan, Joseph Tung-Chieh Chang, Ray-Ming Lin, Hao-Chung Kuo
Format: Article
Language:English
Published: Elsevier 2019-06-01
Series:Results in Physics
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379719300373

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http://www.sciencedirect.com/science/article/pii/S2211379719300373

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