Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization
The current paper presents an optimization study for the designing of a highly sensitive inertial grade capacitive accelerometer based on comb-drive actuation and sensing. The proof mass, suspension system (beams or tethers), stators and rotors have to be realized through an HAR (high aspect ratio)...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-09-01
|
| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/september_09/P_488.pdf |