Research on a UV-assisted chemical modification strategy for monocrystalline silicon
<p>A novel UV-assisted chemical modification (UVA-CM) strategy is proposed for micro-grinding monocrystalline silicon based on UV photocatalysis theory in order to develop a combined machining technology. Comparative experiments are carried out between a single heating chemical modification (H...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2021-02-01
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| Series: | Mechanical Sciences |
| Online Access: | https://ms.copernicus.org/articles/12/133/2021/ms-12-133-2021.pdf |