An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS
In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit)...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2017-08-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/6/285/2017/jsss-6-285-2017.pdf |