Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone
The existing MEMS bionic vector hydrophone has the problems of low-sensitivity and narrow-working band, and the sensitivity and working bandwidth cannot be improved simultaneously by changing the single microstructural parameter. In this paper, the MEMS bionic vector hydrophone microstructural param...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2021-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2021/5580390 |