Analysis of a three-stator multi-degree-of-freedom piezoelectric actuator based on symmetrical distribution
In this paper, a piezoelectric actuator with three symmetrical distributions is designed. Piezoelectric ceramics are polarized in a set manner. The excitation voltage signals of the same amplitude and different phases are applied to the actuator, and an elliptical trajectory is generated on the driv...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0052094 |