The source of macroparticle-free plasma flows for nanoelectronics
The paper describes the source of solid-phase materials plasma flow generated by vacuum-arc discharge in vapors of diffuse evaporated anode. The source can efficiently create macroparticle-free plasma flows of various metals in vacuum, and provided the vacuum chamber is filled with required working...
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| Format: | Article |
| Language: | English |
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Politehperiodika
2013-06-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
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| Online Access: | http://www.tkea.com.ua/tkea/2013/4_2013/pdf/08.zip |