Development of the chemical vapor deposition process for applying molybdenum coatings on the components in assembly and engine construction
The process of chemical vapor deposition of Mo and Mo-С coatings was studied by means of thermal decomposition of molybdenum hexacarbonyl. The kinetics of the coating growth in the range of 480 °C–540 °C and the pressure in the reaction volume from 9 Pa to 16 Pa were explored. The dependences of coa...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
PC Technology Center
2020-04-01
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| Series: | Eastern-European Journal of Enterprise Technologies |
| Subjects: | |
| Online Access: | http://journals.uran.ua/eejet/article/view/201540 |