Development of a calibration system for wafer-type temperature sensor
Wafer-type temperature sensors are widely used during semiconductor fabrication as integrated monitoring sensors for the real-time monitoring of wafer surface temperature, which affects the quality and yield of semiconductor devices. In recent years, various wafer-type temperature sensors have been...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/6.0000536 |