Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume app...

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Bibliographic Details
Main Authors: Rocco Crescenzi, Giuseppe Vincenzo Castellito, Simone Quaranta, Marco Balucani
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
vibrating gyroscope
MEMS
comb-drive
micromachining
cantilever
compliant elements
Online Access:https://www.mdpi.com/1424-8220/20/10/2822

Internet

https://www.mdpi.com/1424-8220/20/10/2822

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