The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

The ongoing development of microelectromechanical systems (MEMS) over the past decades has made possible the achievement of high-precision micromanipulation within the micromanufacturing, microassembly and biomedical fields. This paper presents different design variants of a horizontal electrotherma...

Full description

Bibliographic Details
Main Authors: Marija Cauchi, Ivan Grech, Bertram Mallia, Pierluigi Mollicone, Nicholas Sammut
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Actuators
Subjects:
MEMS microgrippers
micromanipulation
red blood cells
electrothermal actuation
PolyMUMPs™
SOIMUMPs™
structure thickness
air gap thickness
polysilicon
single crystal silicon
Online Access:http://www.mdpi.com/2076-0825/7/3/38

Internet

http://www.mdpi.com/2076-0825/7/3/38

Similar Items