Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption
Zinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning el...
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doaj-fc2c6a9e64244e7dbcf12b779d05c6e92020-11-25T03:09:32ZengMDPI AGMaterials1996-19442020-08-01133510351010.3390/ma13163510Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface DesorptionLukasz Skowronski0Arkadiusz Ciesielski1Aleksandra Olszewska2Robert Szczesny3Mieczyslaw Naparty4Marek Trzcinski5Antoni Bukaluk6Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, PolandFaculty of Physics, University of Warsaw, Pasteura 5, 02-093 Warsaw, PolandInstitute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, PolandFaculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, PolandInstitute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, PolandInstitute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, PolandInstitute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, PolandZinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning electron microscopy, powder X-ray diffraction, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. It was found that the layer deposited at room temperature is composed of Zn and ZnO crystallites with a number of orientations, whereas those grown at 100 and 200 <inline-formula><math display="inline"><semantics><msup><mrow></mrow><mo>∘</mo></msup></semantics></math></inline-formula>C consist of ZnO grains and exhibit privileged growth direction. Presented results clearly show the influence of ZnO decomposition and segregation of Zn atoms during evaporation and post-deposition annealing on microstructure and optical properties of zinc oxide films.https://www.mdpi.com/1996-1944/13/16/3510ZnOdecompositionsegregationannealingoptical constantsmicrostructure |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Lukasz Skowronski Arkadiusz Ciesielski Aleksandra Olszewska Robert Szczesny Mieczyslaw Naparty Marek Trzcinski Antoni Bukaluk |
spellingShingle |
Lukasz Skowronski Arkadiusz Ciesielski Aleksandra Olszewska Robert Szczesny Mieczyslaw Naparty Marek Trzcinski Antoni Bukaluk Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption Materials ZnO decomposition segregation annealing optical constants microstructure |
author_facet |
Lukasz Skowronski Arkadiusz Ciesielski Aleksandra Olszewska Robert Szczesny Mieczyslaw Naparty Marek Trzcinski Antoni Bukaluk |
author_sort |
Lukasz Skowronski |
title |
Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption |
title_short |
Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption |
title_full |
Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption |
title_fullStr |
Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption |
title_full_unstemmed |
Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption |
title_sort |
microstructure and optical properties of e-beam evaporated zinc oxide films—effects of decomposition and surface desorption |
publisher |
MDPI AG |
series |
Materials |
issn |
1996-1944 |
publishDate |
2020-08-01 |
description |
Zinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning electron microscopy, powder X-ray diffraction, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. It was found that the layer deposited at room temperature is composed of Zn and ZnO crystallites with a number of orientations, whereas those grown at 100 and 200 <inline-formula><math display="inline"><semantics><msup><mrow></mrow><mo>∘</mo></msup></semantics></math></inline-formula>C consist of ZnO grains and exhibit privileged growth direction. Presented results clearly show the influence of ZnO decomposition and segregation of Zn atoms during evaporation and post-deposition annealing on microstructure and optical properties of zinc oxide films. |
topic |
ZnO decomposition segregation annealing optical constants microstructure |
url |
https://www.mdpi.com/1996-1944/13/16/3510 |
work_keys_str_mv |
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