Influence of Electrochemical Etching Modes under One Stage and Two Stage Formation of Porous Silicon on the Degree of Oxidation of its Surface Layer under Natural Conditions
Purpose. In this study, some features of the formation of the multilayer structures in porous silicon were investigated by scanning electron microscopy and X-ray emission spectroscopy. Methods and tesniques. Method of electrochemical etching in hydrofl uoric acid solutions was used for the synthesi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2019-12-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: | |
| Online Access: | https://journals.vsu.ru/kcmf/article/view/2364 |