Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass
Growth of large-area monolayer transition metal dichalcogenides is critical for their application but remains challenging. Here Yang et al. report rapid chemical vapor deposition of 6-inch monolayer molybdenum disulfide by sufficiently uniformly supplying the precursors and catalysts.
Main Authors: | , , , , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2018-03-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-018-03388-5 |