Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass
Growth of large-area monolayer transition metal dichalcogenides is critical for their application but remains challenging. Here Yang et al. report rapid chemical vapor deposition of 6-inch monolayer molybdenum disulfide by sufficiently uniformly supplying the precursors and catalysts.
Main Authors: | Pengfei Yang, Xiaolong Zou, Zhepeng Zhang, Min Hong, Jianping Shi, Shulin Chen, Jiapei Shu, Liyun Zhao, Shaolong Jiang, Xiebo Zhou, Yahuan Huan, Chunyu Xie, Peng Gao, Qing Chen, Qing Zhang, Zhongfan Liu, Yanfeng Zhang |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2018-03-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-018-03388-5 |
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